The Keithley 6517B Electrometer/High Resistance Meter is a leading solution for researchers and engineers who require ultra-sensitive low-current measurement, high-resistance testing, and high-voltage sourcing in one instrument. With the ability to measure currents as low as femtoamps, resistances up to 10^16 Ω, and voltages with extremely high input impedance, the 6517B is purpose-built for applications where conventional DMMs cannot deliver the required precision.
Equipped with a programmable 1 kV voltage source, it supports comprehensive resistivity, insulation, and leakage current testing without the need for external sourcing equipment. The 6517B is widely adopted in semiconductor characterization, dielectric materials research, and capacitor leakage testing, offering unmatched sensitivity and repeatability.
Key Features:
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Measures ultra-low currents down to femtoamp resolution
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Resistance measurement capability up to 10^16 Ω
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Integrated programmable 1 kV source for resistivity testing
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High input impedance for accurate high-resistance measurements
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Optimized for advanced R&D, QA, and production test environments
Compatible Applications:
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Semiconductor device and sensor characterization
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Dielectric and insulation resistance measurements
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Capacitor leakage and breakdown studies
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Surface and volume resistivity testing of materials
Included Accessories:
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Measurement leads
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User documentation and quick-start guide
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Optional test fixtures available separately
Compliance:
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ISO 9001 certified manufacturing
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CE, UL, and global electrical safety standards
Benefits for Lab & Field Users:
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Combines precision electrometer and high-voltage source in one unit
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Provides reliable, ultra-sensitive measurements for demanding test needs
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Reduces setup complexity by integrating source and measurement functions
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Ensures confidence and repeatability in critical research and production





